Ultra clean processing of semiconductor surfaces XV : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.
| Author/creator | International Symposium on Ultra Clean Processing of Semiconductor Surfaces 2021 : Mechelen, Belgium) |
| Format | Electronic and Book |
| Publication Info | Baech, Switzerland : Scientific.Net : distributed worldwide by Trans Tech Publications Ltd, [2021] |
| Description | xiv, 325 pages : illustrations ; 24 cm. |
| Supplemental Content | Full text available from Knovel, Academic, Safety & Industrial Hygiene |
| Subject(s) |
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| Other author/creator | Mertens, Paul. |
| Other author/creator | Wostyn, Kurt. |
| Other author/creator | Meuris, Marc. |
| Other author/creator | Heyns, Marc. |
| Series | Solid state phenomena, 1012-0394 ; volume 314 |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2021448165 |
| ISBN | 9783035718010 |
| ISBN | 3035718016 |
Available Items
| Library | Location | Call Number | Status | Item Actions | |
| Electronic Resources | Access Content Online | ✔ Available |